METAS Micro Coordinate Measuring Machine (µ-CMM)

The Micro Coordinate Measuring Machine (µ-CMM) was developed by METAS in collaboration with EPFL, MECARTEX and Philips CFT. It is designed for the high-precision three-dimensional measurement of microcomponents and precision components. The measurement system combines an interferometrically monitored precision translation stage with a specially developed probing system. With a probing force of less than 0.5 mN, the system also enables the measurement of sensitive workpieces without causing plastic deformation.

In addition to single-point measurements, the µ-CMM also supports continuous scanning of complex freeform geometries. Interferometric position measurement and high-precision probing technology enable the reliable detection of the smallest form and positional deviations. Numerical simulations of the measurement process using a virtual CMM also allow workpiece- and application-specific measurement uncertainties to be determined.

The Micro Coordinate Measuring Machine has a measuring volume of 90 mm × 90 mm × 38 mm and achieves measurement uncertainties of down to 50 nm for single-point measurements, with a probing repeatability of 5 nm.