Stylus Profilometer MarSurf LD°130

For surface measurements, METAS uses the MarSurf LD 130 stylus profilometer, which features a precise reference surface. The stylus arm deflection is measured optoelectronically using a diffraction grating. With a stylus arm length of 100 mm, the measuring range for profile measurements is 130 mm horizontally and 13 mm vertically. The diamond stylus tip typically has a tip radius of 2 µm and a cone angle of either 90° or 60°. The static measuring force can be adjusted from 0.5 mN to 30 mN (0.72 mN in accordance with the standard).

The following measuring ranges and measurement uncertainties are achieved for the measurands listed below: